Semiconductor Ultra Pure Water System
Preparation process:
1. Pretreatment system → reverse osmosis system → intermediate water tank → coarse mixing bed → fine mixing bed → pure water tank → pure water pump → ultraviolet sterilizer → Polished mixing bed → precision filter → water point (≥ 18mω.cm)
2. Pretreatment → reverse osmosis → intermediate water tank → water pump →EDI device → purified water tank → pure water pump → ultraviolet sterilizer → Polishing mixing bed →0.2 or 0.5μm precision filter → water point (≥ 18mω.cm)
3. Pretreatment → primary reverse osmosis → Dosing machine (PH regulation)→ Intermediate water tank → second stage reverse osmosis (positive charge reverse osmosis membrane)→ pure water tank → pure water pump →EDI device → UV sterilizer →0.2 or 0.5μm precision filter → water point (≥ 17mω.cm)
4. Pretreatment → reverse osmosis → intermediate water tank → water pump →EDI device → pure water tank → pure Water pump → UV sterilizer →0.2 or 0.5μm precision filter → water point (≥ 15mω.cm)
5. Pretreatment system → reverse osmosis system → intermediate water tank → pure water pump → coarse mixing bed → fine mixing bed → UV sterilizer → precision filter → water point (≥ 15mω.cm)
Ultra-pure water equipment in the semiconductor industry uses microcomputer + touch screen control technology, combined with efficient automatic control system, which effectively guarantees the stability of the equipment, and greatly saves the labor cost and maintenance cost, the utilization rate of water resources has been effectively improved, the reliability of the equipment operation process is high, the operation is simple and easy to understand. Compared with other products , this device has a higher cost performance and is a worthy choice for ultra-pure water equipment in the semiconductor industry.
Equipment features:
The equipment can access the national tap water standard water as the source water, and increase the quartz sand filter, activated carbon filter, sodium ion softens, precision filters and other four pretreatment, and RO reverse osmosis host system and EDI ion exchange technology, effectively extend the service life of the equipment, reduce the manual operation complexity and maintenance workload. The water tank is equipped with a liquid level control system, the water pump is equipped with a pressure protection device and online water quality monitoring and control instruments, so that the automation of the equipment has been greatly improved. In terms of the selection of equipment, the company can make special customization according to the requirements of customers for water quality, which can ensure that the water quality is up to standard and reduce the required cost.
Application field:
1. Electrolytic capacitor production aluminum foil and working parts cleaning.
2. Tube production, tube cathode coated with carbonate solution.
3. Pure water for picture tube and cathode ray tube production and dosing.
4. Black and white picture tube screen production, glass shell cleaning, precipitation, wetting, film washing, tube neck cleaning with pure water.
5. The production of liquid crystal display and the screen surface need to be cleaned with pure water and dispensed with pure water.
6. Transistor production is mainly used for cleaning silicon wafers, and a small amount is used for pharmaceutical liquid preparation.
7. Integrated circuit production in high purity water to clean silicon wafers.
8. Semiconductor materials, devices, printed circuit boards and integrated circuits.
9. LCD LCD display, PDP plasma display.
10. High-quality picture tube, fluorescent powder production.
11. Production, processing and cleaning of semiconductor materials and wafer materials
12. Ultra-pure materials and ultra-pure chemical reagents, ultra-pure chemical materials
Water quality standards: in line with the United States ASTM pure water quality standards, the Ministry of Electronics industry high purity water quality trial standards, the United States semiconductor industry for pure water indicators, Japan integrated circuit water quality standards, domestic and foreign large-scale integrated circuit water quality standards